our company SF6 By-Products Safety Kit. Working protection kit contains mask, safety goggles, gloves and more to protect against toxic decomposition products. Vacuum cleaner can remove solid decomposition products.
[email protected]SF6 is applied in the above process as an etching gas. Due to the density and large molecule size, SF6 is a preferred etching gas in flat panel and MEMS production processes. Fluorinated gases, such as Sulfur Hexafluoride (SF6), play very important roles in the manufacturing of silicon devices.
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